# Trade Mark Journal No.2026/012 20 March 2026

## UK00004348500 3 March 2026 (9)

Pascalo

International priority date claimed: 26 February 2026 (United States of America) (99672276)

Class 9
  Metrology apparatus for semiconductor manufacturing, namely, in-situ units for measuring thin film stress on semiconductor wafers during transport into and out of process chambers of physical vapor deposition (PVD) and chemical vapor deposition (CVD) tools; downloadable and recorded computer software for controlling, operating, and analyzing measurements from such metrology apparatus.

KLA Corporation

Representative: Wynne-Jones IP Limited